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Harrick Plasma O2 Plasma Cleaner 電漿清洗機

Surface Cleaning and Treatment,Ashing,Etching

Physics of Plasma — what plasma is, how it is generated and sustained, and the basics of how it interacts with a material surface

 

Plasma Advantages — the advantages of plasma surface treatment for the surface itself, process flexibility and consistency, low-cost, ease-of-use, and user and environmental safety

 

Plasma-Surface Interaction — the fundamental modalities of plasma-surface interaction: ablation, activation, crosslinking and deposition

 

Plasma Process Gases — Air,O2,N2,Ar,H2 : a guide to the use of different plasma process gases for chemical and mechanical contamination removal, oxidation, activation, crosslinking and deposition

 

Plasma Cleaner Information


Plasma Cleaner Features
— Plasma Cleaner product features, model options, device requirements and applied power settings

 

Plasma Accessory Features — product features of our PlasmaFlo gas mixing/metering and vacuum pump accessories

 

Details of Operation — basic principles of operation, details of operational procedure and general guidance on surface cleaning and modification

 

Ordering Information — contact and ordering information for our low-cost Plasma Cleaner models and PlasmaFlo gas mixing/metering and vacuum pump accessories

 

Technical References — a partial listing of technical articles and patents that reference the use of our Plasma Cleaner models

 

Specific Plasma Applications


Plasma Applications: Plasma Cleaning — the advantages of plasma cleaning for surface preparation prior to bonding and other applications; ATR measurements demonstrating contaminant removal following plasma cleaning

 

Plasma Applications: Polymers — surface cleaning and surface treatment of polymers, surface restructuring through polymer crosslinking, chemical surface modification through activation and grafting, and polymer surface deposition

 

Plasma Applications: Biomaterials — sterilization of medical instruments, adhesion promotion of biomaterials, alteration of biomaterial wetting properties, deposition of biomaterial coatings and plasma enhancement of biocompatibility

 

PDC-32G Basic Plasma Cleaner

with 3 " diameter

 

PDC-001 Expanded Plasma Cleaner with 6" diameter

 

PlasmaFlo

PlasmaFlo is an optional process gas flow mixer and pressure monitor for

Dual gas feeds for process gas mixing

Digital display thermocouple vacuum gauge for measuring total chamber pressure

 

KD Syringe Pump

PDC-32G Basic Plasma Cleaner

PDC-001 Expanded Plasma Cleaner

Key applications areas :

include of :

materials science, polymer science, biomedical materials, sterilization of dental and medical implants and instruments,optical cleaning and micro-fluidicssurface cleaning, surface sterilization, surface activation, surface energy alteration, surface preparation for bonding and adhesion,PDMS bondong, modification of surface chemistry,General Plasma Information

Processing Methods

• General processing sequence


1. Pattern PDMS by replica molding from a master mold
2. Oxidize PDMS in O2 or air plasma, etching hydrocarbons and leaving silanol (SiOH) groups on the surface, rendering the surface hydrophilic
3. Place in contact with another oxidized PDMS or glass surface to form bridging Si-O-Si bond at the interface, creating an irreversible seal


• Suggested process protocol guidelines and process parameter values for plasma treatment of PDMS using a Harrick Plasma Cleaner (some experimentation may be required to optimize process)


1. Use oxygen (O2) or room air as the process gas
2. Pressure: 100 mTorr to 1 Torr
3. RF power: Medium or High
4. Process time: 20-60 seconds
5. An example protocol for PDMS plasma treatment using a Harrick Plasma cleaner as demonstrated in a video published by the Jeon Research Group

http://www.jove.com/index/Details.stp?ID=261